C-number: C-85-25-004-X-00
Revision: 00
Vote — approved
84.AQ-2023-004-RULE 338 (SEMICONDUCTOR MANUFACTURING) Set a public hearing, as required by Arizona Revised Statutes (A.R.S.) § 49-479(b), for September 25, 2024, at 9:30 a.m. to solicit comments on the proposed revision of Maricopa County Air Pollution Control Regulations, Rule 338 (Semiconductor Manufacturing) and the associated proposed revision to the Arizona State Implementation Plan (SIP). Following the public hearing, the Board is requested to adopt the proposed amendments to the rule and
Item Text
84. AQ-2023-004-RULE 338 (SEMICONDUCTOR MANUFACTURING) Set a public hearing, as required by Arizona Revised Statutes (A.R.S.) § 49-479(b), for September 25, 2024, at 9:30 a.m. to solicit comments on the proposed revision of Maricopa County Air Pollution Control Regulations, Rule 338 (Semiconductor Manufacturing) and the associated proposed revision to the Arizona State Implementation Plan (SIP). Following the public hearing, the Board is requested to adopt the proposed amendments to the rule and to approve submission of the amended rule as a revision to the Arizona SIP. The purpose of Rule 338 is to limit volatile organic compound emissions from the semiconductor manufacturing industry. The last significant revision to the rule occurred in 1999. The Maricopa County Air Quality Department (MCAQD) is proposing to revise Rule 338 to incorporate reasonably available control technology (RACT) controls for nitrogen oxide emissions generated during the semiconductor manufacturing process. In addition, MCAQD is proposing to revise some of the volatile organic compound controls in the rule to ensure the controls continue to implement RACT. (C-85-25-004-X-00)
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